Diffusion in silicon : 10 years of research
著者
書誌事項
Diffusion in silicon : 10 years of research
(Diffusion and defect data : solid state data, pt. A . Defect and diffusion forum ; v. 153-155)
Scitec Publications, c1998
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内容説明・目次
内容説明
This volume presents a thorough treatment of the subject, covering a full decade of progress in the understanding of Diffusion in Silicon.
目次
Pressure and Stress Effects on Diffusion in Si
Boron Diffusion in Pre-Amorphised Silicon: Interactions with the End of Range Defects
Stress in Silicon Nitride Films and Its Effect on Boron Diffusion in Silicon
Quantum Effects on Hydrogen Diffusion in Silicon
Self-Diffusion in Silicon
Diffusion of Si Adsorbates on an Si(001) Surface
Vacancies and Vacancy Defects in Si Observed by Positron Annihilation
Vacancy Distributions in Silicon and Methods for Their Accurate Determination
Interaction and Migration Properties of Ion Beam Induced Point Defects in Crystalline Silicon: Basic Research and Technological Relevance
Review of Growth Striations in CZ and MCZ Silicon Wafers
Theory of Reaction-Diffusion Processes at Very High Dopant Concentrations
Diffusion and Reaction Kinetics of Fast-Ion-Induced Point Defects Studied by Deep Level Transient Spectroscopy
Analytical Expressions for the Length of Stacking Faults during Thermal Nitridation of Oxidized Silicon and Silicon
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