In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.

Author(s)

• Rosenthal, Peter A.
• Duncan, Walter Marvin
• Woollam, John A.

Bibliographic Information

In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.

editors, Peter A. Rosenthal, Walter M. Duncan, John A. Woollam

（Materials Research Society symposium proceedings, v. 502）

Materials Research Society, 1998

Note

Includes bibliographical references and index

• NCID: BA37859882
• ISBN:
  • 1558994076
• LCCN: 98026892
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: ix, 290 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Electronics -- Materials -- Congresses
  • LCSH : Manufacturing processes -- Congresses
  • LCSH : Semiconductors -- Congresses
  • LCSH : Thin filme -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
• Parent Bibliography ID:
  • BA00013775