Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
著者
書誌事項
Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
（Materials Research Society symposium proceedings, v. 509）
Materials Research Society, 1998
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
The field of vacuum microelectronics (VME) has experienced tremendous growth. VME devices benefit from collision-free motion of electrons in vacuum, enabling faster modulation and higher electron energies than possible with solid-state structures. In addition, VME devices can operate in a wide temperature range (4
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