Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.

著者

• Zhum, Wei

書誌事項

Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.

editors, Wei Zhu ... [et al.]

（Materials Research Society symposium proceedings, v. 509）

Materials Research Society, 1998

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA37860600
• ISBN:
  • 1558994157
• LCCN: 98033480
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xi, 207 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Vacuum technology -- Congresses
  • LCSH : Thin films -- Congresses
  • LCSH : Field emission cathodes -- Congresses
  • LCSH : Ion implantation -- Congresses
• 親書誌ID:
  • BA00013775