Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.

著者

• Hayzelden, Clive
• Hetherington, Crispin
• Ross, Frances

書誌事項

Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.

editors, Clive Hayzelden, Crispin Hetherington, Frances Ross

（Materials Research Society symposium proceedings, v. 523）

Materials Research Society, 1998

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA37860961
• ISBN:
  • 1558994297
• LCCN: 98028503
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xi, 270 p.
• 分類:
  • LCC : TK7874.76
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Integrated circuits -- Ultra large scale integration -- Testing -- Congresses
  • LCSH : Semiconductors -- Testing -- Congresses
  • LCSH : Electron microscopy -- Congresses
• 親書誌ID:
  • BA00013775