Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.

著者

• Hayzelden, Clive
• Hetherington, Crispin
• Ross, Frances

書誌事項

Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.

editors, Clive Hayzelden, Crispin Hetherington, Frances Ross

（Materials Research Society symposium proceedings, v. 523）

Materials Research Society, 1998

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA37860961
• ISBN:
  • 1558994297
• LCCN: 98028503
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xi, 270 p.
• 分類:
  • LCC : TK7874.76
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Integrated circuits -- Ultra large scale integration -- Testing -- Congresses
  • LCSH : Semiconductors -- Testing -- Congresses
  • LCSH : Electron microscopy -- Congresses
• 親書誌ID:
  • BA00013775