Laser-assisted microtechnology
Author(s)
Bibliographic Information
Laser-assisted microtechnology
（Springer series in materials science, v. 19）
Springer, c1998
2nd, updated ed
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
An introduction to the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter has been added on the laser-assisted wet chemical micro-etching. This is a new method for direct 3-D micro-structuring of solids, with a number of potential applications.
Table of Contents
- Laser-based equipment for microtechnology
- laser micromachining of thin films
- local laser-induced heat treatment
- laser melting and microwelding
- laser microshaping
- maskless laser micropatterning
- pulsed laser-plasma deposition of thin films and film structures.
by "Nielsen BookData"