Trends and new applications of thin films : proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998
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書誌事項
Trends and new applications of thin films : proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998
（Materials science forum, v. 287-288）
Trans Tech Publications, c1998
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内容説明・目次
内容説明
Volume is indexed by Thomson Reuters CPCI-S (WoS).
The proceedings of this Symposium cover a broad range of areas concerned with thin film research and applications. Particular emphasis is placed on the properties of thin films and their final application in modern technology.
目次
Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry
Crystallography and Microstructure of Thin Films Studied by X-Ray and Electron Diffraction
Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques
The Manufacture of Thin Film Transistors and Color Filters for Flat Liquid Crystal Displays
Doping Diamonds and Diamond Films for Electronic Applications
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films
Fabrication of Micro- and Nanostructures
Modelling of PVC Processes
Real Time Optical Method of Stress Measurements in Thin Films
Spectroellipsometric Method for Process Monitoring of Semiconductor Thin Films and Interfaces
Giant Magnetoresistive Sensors for Industrial Applications
Bioactive Films
In-Situ Control of Stoichiometry in Room Temperature MBE-Growth of ZrO2 Thin Films Using a Novel Hyperthermal Oxygen Atom Source
Surface Analysis of Hard Coatings Deposited by Modified Pulse Arc Process
High Rate Deposition of Thick Oxide Layers on Plastic Substrates
Cathodic Arc Evaporation - A Versatile Tool for Thin Film Deposition
Thin Film Thermo-Mechanical Sensors Embedded in Metallic Structures
Novel Three Dimensionally Integrated Thin Film Color Detector for Digital Signal Processing
Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon
Photoinduced Effects in Thin Amorphous Chalcogenide Films
Optimized Amorphous Silicon Based Two-Terminal Thin Film Detectors for Color Recognition
Material-Selective Planarization of Oxide Layers: A Novel Technology
Depth Profiling of Thin TiSix-Films on Silicon Carbide by SNMS
Flowfill-Process as a New Concept for Inter-Metal-Dielectrics
Copper Metallization of Submicron Trenches with Pulsed Vacuum Arc
High Resolution TEM Investigations of Nanostructures in Hard Amorphous Carbon Films
Properties of Si3N4-Layers Deposited by Medium Frequency Twin Magnetron Sputtering
On the Initial Cubic Phase Nucleation in Boron Nitride Films
Structure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation
Gradient Interface Layers to Improve c-BN Thin Film Adhesion
Microhardness, Microstructure and Composition Behavior of Stainless Steel 304 Laser Surface Alloyed with Silicon
Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering
Infrared Analysis of Boron Nitride Thin Films
Transferred Layers Properties in Dry Sliding Contact of Copper/Carbon-Carbon Composite Couple
Evaluation of Stiffness, Hardness and Adhesion of Thin Films
Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates
Filtering Shields in Vacuum-Arc Plasma Sources
Vacuum-Arc Systems for Depositing 'Drop-Free' Coatings onto Inner Surfaces
Coating Deposition by Condensing the Particle Flux from the Target Sputtered in the Low-Pressure Arc Plasma
Treatment of Materials in Radial Low-Pressure Arc Plasma Streams
Study of a Pulsed DC Glow-Discharge Used for Plasma-CVD with an Ultrafast Videosystem and a Langmuir-Probe
Ion Sputtering of Metals in a System with a Thermionic Inert Gas Plasma Source
Ion Nitriding of Steels in a System with a Thermionic Gas Plasma Source
Optical Emission Spectroscopy in High Target Powder Density Magnetron Source
Bias Enhanced Nucleation and Growth of Diamond Films on Titanium Substrates
An UHV-Compatible DC Off-Axis Sputtering Device for Reactive Sputtering and Investigation of the Plasma Properties during Niobium Deposition
Vacuum-Arc Evaporator of Metals with an Extended Planar Cathode
Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering
High Current Metal-Ion Source for Activated Deposition
Field-Induced Deposition of Hard C-H Coatings on the Steel Surface in a Rich-Propane Flame Flow
CVD Deposition and Characterisation of Highly Conductive ZnO
Effects of Reaction Temperature on the Physical Properties of Chemically Deposited Cds Films
Phase Change during the Initial of Ni30Fe70(Invar) Films on MgO(001) by DC-Biased Plasma-Sputter-Deposition
Thermal- and Photo-Induced Changes of the Optical Properties of Amorphous As3Se2 Thin Films
Structural Invetigations of Sputtered Thin Films with X-Ray Absorption Techniques
Thin Film Properties of Ge-Containing Chalcogenide Glasses
A New Method for the Optical Characterization of Inhomogeneous Thin Films Based Only on Spectroscopic Reflection Measurements
Solid Solution CdxZn1-xS Thin Films Grown by Atomic Layer Epitaxy and Successive Ionic Layer Adsorption and Reaction Techniques
High Rates of Diamond Deposition with Various Crystals Sizes by Combustion Flame Method
Tribological Behaviour of Diamond Coatings Obtained by Combustion Flame Process
Influence of Plasma Conditions on the Deposition of Superhard Amorphous Carbon Films by Laser and Arc Methods
Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering
Correlation between Deposition Rate and Hardness of Remote PECVD Silicon Oxide Films
Study of the Growth Mechanisms and Properties of (Cr,O,N) Films Deposited by Vacuum Arc Evaporation
Measurements of the Loss Probability of Nitrogen Atoms versus Temperature on Aluminium
Theoretical Investigations of the Multitarget Reactive Sputtering Process: Application to the Titanium - Chromium - Oxygen System
On the Use of SNMS for the Manufacture Control of Ag Colloid Containing Sol-Gel Fillms on Glass
Self Organization of Nanostructures during Surface Segregation of S on Ti
Direct Writing of Metallic Nanostructures by Means of Metal Colloids
Amorphous and Crystalline States in Thin Films of N2O
Thin Film Electrodes for Capacitive Chemo- and Biosensors: An Optimization of the Electrodes Geometry
Capacitive Study of Self-Assembled Alkylthiol Monolayers: Surface Charge Effects and Kinetics of Surfactants Adsorption
New Class of Thin Amorphous Films Produced by PE CVD from Orangic Compounds of Carbon Family
Effect of Tensile Stress-Annealing on the Magnetical Behaviour of Some Thin Amorphous Ribbons for Fluxgate Sensors
Magnetic Domains in Microstructured Thin Films with Perpendicular Anisotropy
Micromagnetics of Magnetic Multilayers
Why Evaporated Permalloy/Cu Multilayers Do not Exhibit GMR Effect: In-situ Transport Properties
Structure of Laser-Deposited Fe/Al Multilayers
Investigations in the Structure Properties of Magnetooptical Multilayers with Fe, Tb and Nd
Effect of Sm Concentration and Ar Sputtering Gas Pressure on Magnetic Properties of SmCo/Cr Films
Magneto-Optical Fe/Tb/Nd/Tb Multilayers: Anisotropy and Kerr Rotation
Theoretical Analysis of the Evolution of Composition Profiles in Nanoscale Multilayers
Coulomb Blockade and Single Electron Effects in Arrays of Selforganized Ultrasmall Metal Clusters Observed at Room Temperature
Fractal Analysis of Island Structures of Al Thin Films
Magnetic and Magneto-Optical Properties of Composite Films of Ferromagnetic Ultrafine Particles Dispersed in Polymethyl Methacrylate
Optical Properties of Coatings with Cu and Copper Oxide Colloidal Particles in a SiO2 Matrix
In Situ Preparation of Metal, Metaloxide and Metalnitride Films by Ion Beam Sputtering
Texture Control of TiN Films Deposited by a Dual Ion Beam IBAD
Influence of Deposition Parameters on the Properties of Titanium Nitride Films Formed by Ion Beam Assisted Evaporation
Spin Tunneling and Coulomb Blockade in Co-Al2O3-Permalloy Tunnel Junctions
Ferromagnetic Resonance in Granular Co/Ag and NiFe/Ag Multilayers
Giant Magnetostriction in TbFe/FeCo Multilayers
Influence of the Annealing Process on the GMR Effect in Permalloy/Copper Multilayers
Presence and Absence of Giant Magnetoresistance in Sputtered and Evaporated Permalloy/Copper Multilayers
Application of Bioactive Layers for Chemical Sensors and Analysis Systems
Simulations of the Electrical Properties of Bilayer Lipid Membrane
Pseudomorphous Ti Thin Layer in Ti/MgO Superlattices and on MgO(001) Substrates
Unusual Growth Modes in Pulsed Laser Deposition of ZnSe Thin Films on GaAs
Study of the Growth Mechanisms of Chromium Nitride Films Deposited by Ion Plating
Effect of Schwoebel Barriers on Growth Mechanisms and Morphology of Thin Film
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