Fifth International Vacuum Congress proceedings issue

Author(s)

• International Vacuum Congress
• Redhead, P. A.
• American Vacuum Society
• Ehrlich, G.
• Hoffman, R. W.
• Baker, Jill
• International Union of Vacuum Science, Technology and Application

Bibliographic Information

Fifth International Vacuum Congress proceedings issue

editor, P. A. Redhead ; associated editor, G. Ehrlich ... [et al.] ; editorial board, R. W. Hoffman ... [et. al.] ; assistant to the editor, Jill Baker

（Journal of vacuum science & technology, vol. 9 no. 1, 1972）

The American Institute of Physics, c1972

Other Title

Proceedings of the Fifth International Vacuum Congress, 11-15 October 1971, Sheraton-Boston Hotel, Boston, Mass. U.S.A

Note

Title from cover

"Sponsored by the International Union of Vacuum Science Technology abd Application and the American Vacuum Society"

"The official journal of the American Vacuum Society"

Details

• NCID: BA38455619
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: 32, 560, 33-48 p.
• Size: 29 cm
• Classification:
  • LCC : TR940
  • DC19 : 686.2/325
• Subject Headings:
  • LCSH : Photolithography -- Congresses
  • LCSH : Lithography, Electron beam -- Congresses
  • LCSH : Ion beam lithography -- Congresses
  • LCSH : X-ray lithography -- Congresses
  • LCSH : Photoresists -- Congresses
• Parent Bibliography ID:
  • BA07799828