Low-pressure synthetic diamond : manufacturing and applications

著者

    • Dischler, Bernhard
    • Wild, Christoph

書誌事項

Low-pressure synthetic diamond : manufacturing and applications

Bernhard Dischler, Christoph Wild (eds.)

(Springer series in materials processing)

Springer, c1998

大学図書館所蔵 件 / 18

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注記

Includes bibliographical references

内容説明・目次

内容説明

The advent of low-pressure synthesis techniques for the chemical vapour deposition (CVD) of diamond has opened up a new and fascinating field of research and development. The preparation of diamond in the shape of thin films or extended wafers has enabled a variety of new applications, including optical windows, heat spreaders for thermal management, durable cutting tools, and a variety of sensors. Great effort has been made to develop new and efficient methods of economic low-pressure diamond deposition. This book responds to the worldwide interest with a comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.

目次

  • Introduction
  • CVD Diamond: A New and Promising Material
  • Methods of CVD-Diamond Production
  • Microwave-Plasma Deposition of Diamond
  • Combustion Flame Deposition of Diamond
  • Plasma-Jet Deposition of Diamond
  • Hot-Filament Deposition of Diamond
  • Low-Temperature Diamond Deposition
  • Other CVD Methods for Diamond Production
  • Heteroepitaxy and Highly Oriented Diamond Deposition
  • Applications of CVD Diamond
  • Thermal Properties and Applications of CVD Diamond
  • CVD Diamond for Optical Windows
  • CVD Diamond for X-Ray Windows and Lithography Mask Membranes
  • CVD Diamond for Cutting Tools
  • CVD Diamond Sensors for Temperature and Pressure
  • CVD Diamond for Surface Acoustic Wave Filters
  • Electron Emission from CVD-Diamond Cold Cathodes
  • CVD Diamond for Ultraviolet and Particle Detectors
  • Electronic Devices on CVD Diamond
  • Outlook: CVD Diamond in the 21st Century.

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