Low-pressure synthetic diamond : manufacturing and applications
著者
書誌事項
Low-pressure synthetic diamond : manufacturing and applications
(Springer series in materials processing)
Springer, c1998
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注記
Includes bibliographical references
内容説明・目次
内容説明
The advent of low-pressure synthesis techniques for the chemical vapour deposition (CVD) of diamond has opened up a new and fascinating field of research and development. The preparation of diamond in the shape of thin films or extended wafers has enabled a variety of new applications, including optical windows, heat spreaders for thermal management, durable cutting tools, and a variety of sensors. Great effort has been made to develop new and efficient methods of economic low-pressure diamond deposition. This book responds to the worldwide interest with a comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.
目次
- Introduction
- CVD Diamond: A New and Promising Material
- Methods of CVD-Diamond Production
- Microwave-Plasma Deposition of Diamond
- Combustion Flame Deposition of Diamond
- Plasma-Jet Deposition of Diamond
- Hot-Filament Deposition of Diamond
- Low-Temperature Diamond Deposition
- Other CVD Methods for Diamond Production
- Heteroepitaxy and Highly Oriented Diamond Deposition
- Applications of CVD Diamond
- Thermal Properties and Applications of CVD Diamond
- CVD Diamond for Optical Windows
- CVD Diamond for X-Ray Windows and Lithography Mask Membranes
- CVD Diamond for Cutting Tools
- CVD Diamond Sensors for Temperature and Pressure
- CVD Diamond for Surface Acoustic Wave Filters
- Electron Emission from CVD-Diamond Cold Cathodes
- CVD Diamond for Ultraviolet and Particle Detectors
- Electronic Devices on CVD Diamond
- Outlook: CVD Diamond in the 21st Century.
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