Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.

著者

• Dunham, Scott T.
• Nelson, Jeffrey Steven

書誌事項

Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.

editors, Scott T. Dunham, Jeffrey S. Nelson

（Materials Research Society symposium proceedings, v. 490）

Materials Research Society, c1998

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA38701726
• ISBN:
  • 1558993959
• LCCN: 98033841
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: ix, 273 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC21 : 621.3815/2/015118
• 件名:
  • LCSH : Semiconductors -- Mathematical models -- Congresses
  • LCSH : Semiconductors -- Defects -- Congresses
  • LCSH : Solid state physics -- Congresses
• 親書誌ID:
  • BA00013775