Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.

Author(s)

• Cowern, Nicholas E. B.

Bibliographic Information

Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.

editors, Nichoals E.B. Cowern ... [et al.]

（Materials Research Society symposium proceedings, v. 532）

Materials Research Society, c1998

Note

Includes bibliographical references and index

Details

• NCID: BA38704167
• ISBN:
  • 1558994386
• LCCN: 98034108
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: xi, 228 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction
  • LCSH : Semiconductor doping
  • LCSH : Semiconductors -- Defects
• Parent Bibliography ID:
  • BA00013775