PVD for microelectronics : sputter deposition applied to semiconductor manufacturing

書誌事項

PVD for microelectronics : sputter deposition applied to semiconductor manufacturing

Ronald A. Powell, Stephen M. Rossnagel

(Thin films, v. 26)

Academic Press, c1999

大学図書館所蔵 件 / 22

この図書・雑誌をさがす

注記

Includes bibliographical references and indexes

関連文献: 1件中  1-1を表示

  • Thin films

    Academic Press

    v. 25

    所蔵館15館

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