Microcantilevers for atomic force microscope data storage
著者
書誌事項
Microcantilevers for atomic force microscope data storage
（Microsystems / series editor Stephen D. Senturia）
Kluwer Academic Publishers, c1999
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注記
Includes index
Bibliography: [129]-142 p.
内容説明・目次
内容説明
Microcantilevers for Atomic Force Microscope Data Storage describes a research collaboration between IBM Almaden and Stanford University in which a new mass data storage technology was evaluated. This technology is based on the use of heated cantilevers to form submicron indentations on a polycarbonate surface, and piezoresistive cantilevers to read those indentations.
Microcantilevers for Atomic Force Microscope Data Storage describes how silicon micromachined cantilevers can be used for high-density topographic data storage on a simple substrate such as polycarbonate. The cantilevers can be made to incorporate resistive heaters (for thermal writing) or piezoresistive deflection sensors (for data readback).
The primary audience for Microcantilevers for Atomic Force Microscope Data Storage is industrial and academic workers in the microelectromechanical systems (MEMS) area. It will also be of interest to researchers in the data storage industry who are investigating future storage technologies.
目次
Editor's Preface. 1. Introduction. 2. Heater-Cantilevers for Writing: Design, Fabrication and Basic Characterization. 3. Heater-Cantilevers for Writing: Further Characterization, Modeling and Optimization. 4. Piezoresistive Cantilevers for Readback. 5. Dual-Axis Piezoresistive Cantilevers: Design, Fabrication and Characterization. 6. Dual-Axis Piezoresistive Cantilevers for Tracking: Applications. 7. Conclusion and Future Work. Appendix 1: Heater-Cantilever Fabrication Process. Appendix 2: Piezoresistive Cantilever Fabrication Process. Appendix 3: Dual-Axis Piezoresistive Cantilever Fabrication Process. Bibliography. Index.
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