Proceedings of the Symposium on Etching for Pattern Definition

Author(s)

• Symposium on Etching for Pattern Definition (1976 : Washington, D.C.)
• Hughes, Henry G.
• Rand, Myron J.
• Electrochemical Society

Bibliographic Information

Proceedings of the Symposium on Etching for Pattern Definition

edited by Henry G. Hughes, Myron J. Rand

Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, c1976

Note

Includes bibliographical references and index

Details

• NCID: BA39840794
• LCCN: 76009231
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Princeton, N.J.
• Pages/Volumes: vi, 203 p.
• Size: 23 cm
• Classification:
  • LCC : TK7836
  • DC : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Etching -- Congresses
  • LCSH : Integrated circuits -- Congresses
  • LCSH : Metals -- Etching -- Congresses