Proceedings of the Symposium on Etching for Pattern Definition

著者

• Symposium on Etching for Pattern Definition (1976 : Washington, D.C.)
• Hughes, Henry G.
• Rand, Myron J.
• Electrochemical Society

書誌事項

Proceedings of the Symposium on Etching for Pattern Definition

edited by Henry G. Hughes, Myron J. Rand

Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, c1976

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA39840794
• LCCN: 76009231
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Princeton, N.J.
• ページ数/冊数: vi, 203 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7836
  • DC : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Etching -- Congresses
  • LCSH : Integrated circuits -- Congresses
  • LCSH : Metals -- Etching -- Congresses