Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland March 1998
著者
書誌事項
Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland March 1998
（AIP conference proceedings, 449）
American Institute of Physics, c1998
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- CD-ROM
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注記
Includes bibliographical references and index
"DOE CONF-980364"--T.p. verso
"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998."-pref.
内容説明・目次
内容説明
The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.
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