Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland March 1998
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Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland March 1998
（AIP conference proceedings, 449）
American Institute of Physics, c1998
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注記
Includes bibliographical references and index
"DOE CONF-980364"--T.p. verso
"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998."-pref.
