Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

Author(s)

• Brown, Stuart B.

Bibliographic Information

Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

editors, Stuart Brown ... [et al.]

（Materials Research Society symposium proceedings, v. 518）

Materials Research Society, c1998

Note

Includes bibliographical references and index

Details

• NCID: BA40718415
• ISBN:
  • 1558994246
• LCCN: 98049136
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: xi, 248 p.
• Size: 24 cm
• Classification:
  • LCC : TA404.2
  • DC21 : 620.1/1/072
• Subject Headings:
  • LCSH : Material -- Research -- Equipment and supplies -- Congresses
  • LCSH : Micromechanical systems -- Congresses
• Parent Bibliography ID:
  • BA00013775