Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

著者

• Brown, Stuart B.

書誌事項

Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

editors, Stuart Brown ... [et al.]

（Materials Research Society symposium proceedings, v. 518）

Materials Research Society, c1998

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA40718415
• ISBN:
  • 1558994246
• LCCN: 98049136
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xi, 248 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TA404.2
  • DC21 : 620.1/1/072
• 件名:
  • LCSH : Material -- Research -- Equipment and supplies -- Congresses
  • LCSH : Micromechanical systems -- Congresses
• 親書誌ID:
  • BA00013775