Micro mechanical systems : principles and technology
著者
書誌事項
Micro mechanical systems : principles and technology
（Handbook of sensors and actuators, v. 6）
Elsevier, 1998
大学図書館所蔵 件 / 全7件
-
該当する所蔵館はありません
- すべての絞り込み条件を解除する
注記
Includes bibliographical references
内容説明・目次
内容説明
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
目次
* Introduction
* Photolithographic Microfabrication
* Micromaching by Machine Tools
* Tribological Aspects of Microsystems
* Silicon Microsensors
* Micro-Actuators for Micro-Robots: Electric and Magnetic
* Energy Source and Power Supply Method
* Control Method of Micro Mechanical Systems
* Examples of Microsystems
* Future Problems
「Nielsen BookData」 より