Conference proceedings, 1998 International Conference on Indium Phosphide and Related Materials, May 11-15, 1998, University of Tsukuba, University Hall, Tsukuba, Ibaraki, Japan
Author(s)
Bibliographic Information
Conference proceedings, 1998 International Conference on Indium Phosphide and Related Materials, May 11-15, 1998, University of Tsukuba, University Hall, Tsukuba, Ibaraki, Japan
IEEE Service Center, c1998
- : soft.
- : case.
- Other Title
-
1998 IEEE 10th International Conference on Indium Phosphide and Related Materials
98CH36129
Available at 2 libraries
  Aomori
  Iwate
  Miyagi
  Akita
  Yamagata
  Fukushima
  Ibaraki
  Tochigi
  Gunma
  Saitama
  Chiba
  Tokyo
  Kanagawa
  Niigata
  Toyama
  Ishikawa
  Fukui
  Yamanashi
  Nagano
  Gifu
  Shizuoka
  Aichi
  Mie
  Shiga
  Kyoto
  Osaka
  Hyogo
  Nara
  Wakayama
  Tottori
  Shimane
  Okayama
  Hiroshima
  Yamaguchi
  Tokushima
  Kagawa
  Ehime
  Kochi
  Fukuoka
  Saga
  Nagasaki
  Kumamoto
  Oita
  Miyazaki
  Kagoshima
  Okinawa
  Korea
  China
  Thailand
  United Kingdom
  Germany
  Switzerland
  France
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  Sweden
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  United States of America
Note
"IEEE catalog #98CH36129"
Description and Table of Contents
Description
This text examines test structures for microelectronic devices, their recent progress and future directions. It places an emphasis on such topics as: process characterization; dimensional measurements; interconnection; material characterization; reliability; device characterization; and statistics.
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