1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme - semiconductor manufacturing, meeting the challenges of the global marketplace : ASMC 98 proceedings, September 23-25, 1998, Boston, Massachusetts, USA

書誌事項

1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme - semiconductor manufacturing, meeting the challenges of the global marketplace : ASMC 98 proceedings, September 23-25, 1998, Boston, Massachusetts, USA

IEEE Service Center, c1998

  • : soft.
  • : case.

タイトル別名

98CH36168

98CB36168

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注記

Includes bibliographical references

"IEEE catalog number 98CH36168"

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