Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control

Author(s)

• Mattox, D. M.

Bibliographic Information

Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control

by Donald M. Mattox

Noyes Publications, c1998

Note

Includes bibliographical references and index

Glossary (p.763-877)

• NCID: BA4187194X
• ISBN:
  • 0815514220
• LCCN: 97044664
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Westwood, N.J.
• Pages/Volumes: xxvii, 917 p.
• Size: 24 cm
• Classification:
  • LCC : TS695
  • DC21 : 671.7/35
• Subject Headings:
  • LCSH : Vapor-plating -- Handbooks, manuals, etc