Principles of growth and processing of semiconductors

書誌事項

Principles of growth and processing of semiconductors

S. Mahajan, K.S. Sree Harsha

(McGraw-Hill series in materials science and engineering)

WCB/McGraw-Hill, c1999

  • :Inter. ed.

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

Developing the essential elements of semiconductor behaviour, this text goes on to provide a conceptual framework and introduction to microelectronics. Topics include semiconductors, devices, defects, evaluation, bulk growth, epitaxial growth, oxidation, diffussion, and ion implantation.

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