Principles of growth and processing of semiconductors
著者
書誌事項
Principles of growth and processing of semiconductors
（McGraw-Hill series in materials science and engineering）
WCB/McGraw-Hill, c1999
- :Inter. ed.
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Developing the essential elements of semiconductor behaviour, this text goes on to provide a conceptual framework and introduction to microelectronics. Topics include semiconductors, devices, defects, evaluation, bulk growth, epitaxial growth, oxidation, diffussion, and ion implantation.
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