Etching in microsystem technology

Author(s)

Bibliographic Information

Etching in microsystem technology

Michael Köhler ; translated by Antje Wiegand

Wiley-VCH, 1999

Available at  / 5 libraries

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Note

Includes bibliographical references and index

Details

  • NCID
    BA42246860
  • ISBN
    • 3527295615
    • 3527295615
  • Country Code
    gw
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Weinheim ; Cambridge
  • Pages/Volumes
    xvi, 368 p.
  • Size
    25 cm
  • Classification
  • Subject Headings
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