Etching in microsystem technology
著者
書誌事項
Etching in microsystem technology
Wiley-VCH, 1999
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Microcomponents and microdevices are finding more and more applications in everyday life. Normally they are produced by lithographic etching processes. Hence these processes occupy a key position in microfabrication. This book explains the scientific fundamentals of etching processes. Furthermore it is a practical guide, offering practical advice on many etching processes to help produce perfect microstructures.
目次
- Features of microtechnical etching
- wet chemical etching methods
- dry-etching methods
- microforming by etching of locally changed material
- selected recipes.
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