Organometallic vapor-phase epitaxy : theory and practice
著者
書誌事項
Organometallic vapor-phase epitaxy : theory and practice
Academic Press, c1999
2nd ed
- : hardcover
- : pbk.
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Organometallic Vapor-Phase Epitaxy describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices.
目次
Overview of the OMVPE Process. Thermodynamics. Physical Processes Occurring on the Surface. Source Molecules. Kinetics. Hydrodynamics and Mass Transport. Design of the OMVPE Process. Specific Materials. Superlattice Structures. Devices.
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