Mega-bit memory technology : from mega-bit to giga-bit

Author(s)

• Tango, Hiroyuki

Bibliographic Information

Mega-bit memory technology : from mega-bit to giga-bit

edited by Hiroyuki Tango

（Japanese technology reviews, sect.A. electronics ; v.32）

Gordon & Breach, c1998

Description and Table of Contents

Description

This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies-the longstanding technology driver of Si ULSI-as they advance from the 1 Kbit to the Gbit DRAM era.

Table of Contents

1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7. SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation

by "Nielsen BookData"

• NCID: BA42530092
• ISBN:
  • 9056990985
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Amsterdam
• Pages/Volumes: xiv, 292 p.
• Size: 22 cm
• Classification:
  • DC21 : 621.3973
• Subject Headings:
  • LCSH : Random access memory
  • LCSH : Integrated circuits -- Ultra large scale integration
• Parent Bibliography ID:
  • BA18343769