Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California

著者

書誌事項

Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California

Vijay K. Varadan ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ... [et al.] ; cooperating organizations, Air Force Research Laboratory ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3328）

SPIE, c1998

タイトル別名

Smart electronics and MEMS

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This collection of works on smart electronics and MEMS includes 44 papers on various areas within this field, including applications of CMOS MEMS technology and CAD in thermal microtransducers, MEMS system design and verification tools, and smart antennas and wireless telemetry.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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