Introduction to microelectromechanical (MEM) microwave systems
著者
書誌事項
Introduction to microelectromechanical (MEM) microwave systems
（The Artech House microwave library）（MEMS--Microelectromechanical systems series）
Artech House, c1999
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Microelectromechanical sytems (MEMS) applications in RF and microwave electronics are revolutionizing wireless communications. This text provides a comprehensive explanation of the fabrication and fundamental physics of MEMS and their applications in electronic communication systems. The book integrates circuit fabrication technology, device design-oriented materials, mechanical and microwave considerations, and RF/microwave electronics to give engineers and managers a clear understanding of the potential and limitations of MEMS in electronic communications.
目次
- Microelectromechanical systems - MEMS origins
- MEMS impetus/motivation
- MEMS fabrication technologies
- fundamental MEMS device physics - actuation
- fundamental MEMS devices - the cantilever beam
- microwave MEMS applications - MEM switch design considerations
- the micromachined transmission line
- MEMS-based microwave circuits and systems.
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