Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
著者
書誌事項
Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
（Materials Research Society symposium proceedings, v. 541）
Materials Research Society, 1999
- タイトル別名
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Ferroelectric thin films seven
Ferroelectric thin films 7
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注記
Includes bibliographical references
内容説明・目次
内容説明
This book, first published in 1999, presents the technical information on ferroelectric thin films from an international array of academia, government organizations and industry. The results in DRAM and FERAM devices, as well as enhancements in materials performance for these applications are reported. Advances in integration issues are also discussed, including electrode technologies, annealing procedures, and fabrication methods. The development of ferroelectric thin films for piezoelectric, pyroelectric and optical applications is reviewed. And improved film fabrication procedures, including chemical vapor deposition and chemical solution deposition, are featured. Topics include: BST and DRAM; integration and electrodes; bilayered ferroelectrics; Pb-based ferroelectrics; fundamental material properties and superlattices; ferroelectric gate materials and devices; piezoelectric, electrostrictive, pyroelectric and giant magnetoresistive materials; and ferroelectrics for microwave and optical applications.
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