Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

著者

• International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
• Meyyappan, M.
• Economou, D. J. (Demetre John)
• Butler, S. W. (Stephanie Watts)
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. Meeting

書誌事項

Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

editors, M. Meyyappan, D.J. Economou, S.W. Butler ; [sponsored by] Dielectric Science and Technology and Electronics Divisions

（Proceedings / [Electrochemical Society], v. 97-9）

Electrochemical Society, c1997

注記

"Part of the 191st Meeting of the Electrochemical Society"--P. iii

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA4312797X
• ISBN:
  • 1566771366
• LCCN: 97211633
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: ix, 347 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.85
  • DC : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Design and construction -- Congresses
  • LCSH : Process control -- Congresses
  • LCSH : Semiconductor industry -- Production control -- Congresses
• 親書誌ID:
  • BA01323290