Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
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書誌事項
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
（Proceedings / [Electrochemical Society], v. 97-22）
Electrochemical Society, c1997
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Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
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注記
"This ... volume contains the 13 invited papers, 21 of 22 contributed papers and 10 papers presented as poster at the Second Symposium on 'Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing' which was part 01B of the Symposium on Silicon Cleaning Technology' held at the '1997 Joint International Meeting--The 192nd Meeting of the Electrochemical Society and the 48th Annual Meeting of the International Society of Electrochemistry' from August 31 to September 5, 1997 in Paris/France."--Preface
Includes bibliographic references and indexes