Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11
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Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11
(Proceedings / [Electrochemical Society], v. 97-25)
Electrochemical Society, c1997
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EUROCVD 11
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"High Temperature Materials, Dielectric Science and Technology, and Electronics Divisions of the Electrochemical Society ... [et al.]"
held in Paris, France, September 5-9, 1997