Proceedings of the Symposium on Interconnect and Contact Metallization

著者

• Symposium on Interconnect and Contact Metallization
• Rathore, Harzara S.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. Electrodeposition Division

書誌事項

Proceedings of the Symposium on Interconnect and Contact Metallization

editor, Hazara S. Rathore ... [et al.]

（Proceedings / [Electrochemical Society], v. 97-31）

Electrochemical Society, c1998

タイトル別名

Interconnect and contact metallization

注記

"Dielectric Science and Technology, Electronics, and Electrodeposition divisions."

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA4316326X
• ISBN:
  • 1566771846
• LCCN: 98203944
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: viii, 276 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7874.76
  • DC21 : 621.39/5
• 件名:
  • LCSH : Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Ultra large scale integration -- Materials -- Congresses
  • LCSH : Electrochemical metallizing -- Congresses
  • LCSH : Plasma-enhanced chemical vapor deposition -- Congresses
  • LCSH : Dielectrics -- Congresses
• 親書誌ID:
  • BA01323290