Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Author(s)

• International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
• Rużyłło, Jerzy
• Electrochemical Society. Electronics Division
• Electrochemical Society. Meeting

Bibliographic Information

Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

editors, Jerzy Ruzyllo ... [et al.] ; Electronics Division [of the Electrochemical Society]

（Proceedings / [Electrochemical Society], v. 97-35）

Electrochemical Society, c1998

Other Title

Cleaning technology in semiconductor device manufacturing V

Note

"The Fifth International Symposium of Cleaning Technology in Semiconductor Device Manufacturing was held diring the Fall Meeting [192th] of the Electrochemical Society in Paris [France] in September 1997."--Preface

Includes bibliographical references and indexes

Details

• NCID: BA43170130
• ISBN:
  • 1566771889
• LCCN: 98158681
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: xiii, 650 p.
• Size: 23 cm
• Classification:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductor wafers -- Cleaning -- Congresses
• Parent Bibliography ID:
  • BA01323290