Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

著者

• International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
• Rużyłło, Jerzy
• Electrochemical Society. Electronics Division
• Electrochemical Society. Meeting

書誌事項

Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

editors, Jerzy Ruzyllo ... [et al.] ; Electronics Division [of the Electrochemical Society]

（Proceedings / [Electrochemical Society], v. 97-35）

Electrochemical Society, c1998

タイトル別名

Cleaning technology in semiconductor device manufacturing V

注記

"The Fifth International Symposium of Cleaning Technology in Semiconductor Device Manufacturing was held diring the Fall Meeting [192th] of the Electrochemical Society in Paris [France] in September 1997."--Preface

Includes bibliographical references and indexes

• NII書誌ID(NCID): BA43170130
• ISBN:
  • 1566771889
• LCCN: 98158681
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xiii, 650 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Semiconductor wafers -- Cleaning -- Congresses
• 親書誌ID:
  • BA01323290