Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications

書誌事項

Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications

editors, Ulrich Gösele ... [et al.] ; Electronics Division [of the Electrochemical Society]

(Proceedings / [Electrochemical Society], v. 97-36)

Electrochemical Society, c1998

タイトル別名

Semiconductor wafer bonding : science, technology, and applications IV

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注記

"The Fourth International Symposium on Wafer Bonding [was] held at Paris [France] in summer 1997 ... "--Preface

Includes bibliographical references and indexes

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  • Proceedings

    [Electrochemical Society]

    Electrochemical Society

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