Dielectric material integration for microelectronics

Author(s)

• Brown, William D.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. Meeting

Bibliographic Information

Dielectric material integration for microelectronics

editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society]

（Proceedings / [Electrochemical Society], v. 98-3）

Electrochemical Society, c1998

Note

"This combined volume ... contains material from 2 symposia of the 193rd meeting of the Electrochemical Society, May 3-8, 1998 ... in San Diego ..."--Preface

Includes bibliographical references and index

Details

• NCID: BA43172781
• ISBN:
  • 1566771978
• LCCN: 99159837
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: x, 366 p.
• Size: 23 cm
• Classification:
  • LCC : TK7872.D53
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Dielectric devices -- Congresses
  • LCSH : Dielectrics -- Congresses
  • LCSH : Integrated circuits -- Materials -- Congresses
  • LCSH : Electronic packaging -- Materials -- Congresses
• Parent Bibliography ID:
  • BA01323290