Dielectric material integration for microelectronics

著者

• Brown, William D.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. Meeting

書誌事項

Dielectric material integration for microelectronics

editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society]

（Proceedings / [Electrochemical Society], v. 98-3）

Electrochemical Society, c1998

注記

"This combined volume ... contains material from 2 symposia of the 193rd meeting of the Electrochemical Society, May 3-8, 1998 ... in San Diego ..."--Preface

Includes bibliographical references and index

• NII書誌ID(NCID): BA43172781
• ISBN:
  • 1566771978
• LCCN: 99159837
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: x, 366 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7872.D53
  • DC21 : 621.381
• 件名:
  • LCSH : Dielectric devices -- Congresses
  • LCSH : Dielectrics -- Congresses
  • LCSH : Integrated circuits -- Materials -- Congresses
  • LCSH : Electronic packaging -- Materials -- Congresses
• 親書誌ID:
  • BA01323290