Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.
著者
書誌事項
Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.
（Materials Research Society symposium proceedings, v. 544）
Materials Research Society, c1999
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注記
Includes bibliographical references and indexes
内容説明・目次
内容説明
There is immense interest, both industrial and academic, in developing processes for plasma deposition and modification of polymers. These polymers and treatments have wide-ranging applications in electronics, protective coatings, optical coatings, biomaterials, ophthalmics, corrosion protection, tribology, surface mechanics, membranes, food and pharmaceutical packaging, and sensors. In addition, fundamentals of plasma processes and technology are also of critical importance in many semiconductor processing operations such as etching and treatment of polymers, deposition of low-dielectric constant materials, and dry photoresist. The understanding of plasma polymer deposition in various technical fields, as well as in the treatment methods of polymers, have become critical. This book focuses on the deposition, modification and characterization of polymeric materials which are important for advanced technologies. Particular emphasis is placed on materials and synthesis concepts. Topics include: plasma processes for biomaterials; fundamentals of plasma processing; plasma processing for electronics and optics; and plasma treatments and functional coatings.
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