Proceedings of the twelfth International Symposium on Plasma Processing

Author(s)

Bibliographic Information

Proceedings of the twelfth International Symposium on Plasma Processing

editor, G.S. Mathad ; [sponsored by] Dielectric Science & Technology and electronics Divisions

（Proceedings / [Electrochemical Society], v. 98-4）

the Electrochemical Society, Inc., c1998

Other Title

Plasma processing XII

Available at  / 2 libraries

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Note

Includes bibliographical references and index

Related Books： 1-1 of 1

  • Proceedings

    [Electrochemical Society]

    Electrochemical Society

Details

  • NCID
    BA43283625
  • ISBN
    • 1566771986
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Pennington, NJ
  • Pages/Volumes
    viii, 292 p.
  • Size
    24 cm
  • Parent Bibliography ID
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