Proceedings of the twelfth International Symposium on Plasma Processing

著者

• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Mathad, G. S.

書誌事項

Proceedings of the twelfth International Symposium on Plasma Processing

editor, G.S. Mathad ; [sponsored by] Dielectric Science & Technology and electronics Divisions

（Proceedings / [Electrochemical Society], v. 98-4）

the Electrochemical Society, Inc., c1998

タイトル別名

Plasma processing XII

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA43283625
• ISBN:
  • 1566771986
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: viii, 292 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290