Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing
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書誌事項
Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing
（Proceedings / [Electrochemical Society], v. 98-7）
Electrochemical Society, c1998
- タイトル別名
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Chemical mechanical planarization in integrated circuit device manufacturing
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注記
"Electronics and Dielectric Science and Technology Divisions."
"This volume contains most of the papers presented at the Second International Symposium on Chemical Mechanical Planarization (CMP) in Integrated Circuit (IC) Device Manufacturing held at the 193rd Annual Meeting of Electrochemical Society in San Diego during May 5-7, 1998."
Includes bibliographical references and indexes