Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability

著者

• Andricacos, P. C.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. Electrodeposition Division

書誌事項

Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability

editors, P. C. Andricacos ...[et al.]

（Proceedings / [Electrochemical Society], v. 98-6）

Electrochemical Society, c1999

注記

"Dielectric Science and Technology, Electronics, and Electrodeposition Divisions"

Includes bibliographies and indexes

詳細情報

• NII書誌ID(NCID): BA43299374
• ISBN:
  • 1566772001
• LCCN: 99062262
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: viii, 274 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290