Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability

Author(s)

• Andricacos, P. C.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. Electrodeposition Division

Bibliographic Information

Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability

editors, P. C. Andricacos ...[et al.]

（Proceedings / [Electrochemical Society], v. 98-6）

Electrochemical Society, c1999

Note

"Dielectric Science and Technology, Electronics, and Electrodeposition Divisions"

Includes bibliographies and indexes

Details

• NCID: BA43299374
• ISBN:
  • 1566772001
• LCCN: 99062262
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: viii, 274 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290