Proceedings of the International Symposium on Microstructures and Microfabricated Systems IV

Author(s)

• International Symposium on Microstructures and Microfabricated Systems
• Hesketh, P. J. (Peter J.)
• Hughes, Henry G.
• Bailey, Wayne E.
• Electrochemical Society. Sensor Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Meeting

Bibliographic Information

Proceedings of the International Symposium on Microstructures and Microfabricated Systems IV

editors, Peter J. Hesketh, Henry Hughes, Wayne E. Bailey

（Proceedings / [Electrochemical Society], v. 98-14）

Electrochemical Society, c1998

Other Title

Microstructures and microfabricated systems IV

Note

"Sensor, Dielectric Science and Technology, and Electronics Divisions"

"Held at the 194th Meeting of the Electrochemical Society, November 1-6th, 1998, in Boston, Massachusetts"--Pref

Includes bibliographical references and indexes

Details

• NCID: BA43300746
• ISBN:
  • 1566772060
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: viii, 270 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microstructure -- Congresses
  • LCSH : Micromechanics -- Congresses
• Parent Bibliography ID:
  • BA01323290