Micromachined ultrasound-based proximity sensors

Author(s)

• Hornung, Mark R.
• Brand, Oliver

Bibliographic Information

Micromachined ultrasound-based proximity sensors

Mark R. Hornung, Oliver Brand

（Microsystems / series editor Stephen D. Senturia, 4）

Kluwer Academic, c1999

Note

Includes bibliographical references (p. [111]-118) and index

Details

• NCID: BA43349916
• ISBN:
  • 079238508X
• LCCN: 99020175
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston
• Pages/Volumes: xii, 120 p.
• Size: 25 cm
• Classification:
  • LCC : TK7882.P7
  • DC21 : 681/.25
• Subject Headings:
  • LCSH : Proximity detectors
  • LCSH : Ultrasonic transducers
  • LCSH : Microelectromechanical systems
• Parent Bibliography ID:
  • BA39071521