Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology

Author(s)

• Symposium on Process Physics and Modeling in Semiconductor Technology
• Murthy, C. S.
• Srinivasan, G. R.
• Dunham, Scott T.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Meeting

Bibliographic Information

Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology

editors, C.S. Murthy, G.R. Srinivasan, S.T. Dunham ; Electronics Division [of the Electrochemical Society]

（Proceedings / [Electrochemical Society], v. 99-2）

Electrochemical Society, c1999

Other Title

Process physics and modeling in semiconductor technology

Note

"This Proceedings Volume contains papers that were presented at the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology held in Seattle, Washington, May 5-6, 1999, as part of the Spring [195th] Meeting of the Electrochemical Society."--Preface

Includes bibliographic references and indexes

Details

• NCID: BA43707528
• ISBN:
  • 1566772249
• LCCN: 99062162
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, New Jersey
• Classification:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Mathematical models Congresses
  • LCSH : Crystals -- Defects -- Mathematical models Congresses
  • LCSH : Ion implantation -- Mathematical models Congresses
• Parent Bibliography ID:
  • BA01323290