Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology

著者

• Symposium on Process Physics and Modeling in Semiconductor Technology
• Murthy, C. S.
• Srinivasan, G. R.
• Dunham, Scott T.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Meeting

書誌事項

Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology

editors, C.S. Murthy, G.R. Srinivasan, S.T. Dunham ; Electronics Division [of the Electrochemical Society]

（Proceedings / [Electrochemical Society], v. 99-2）

Electrochemical Society, c1999

タイトル別名

Process physics and modeling in semiconductor technology

注記

"This Proceedings Volume contains papers that were presented at the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology held in Seattle, Washington, May 5-6, 1999, as part of the Spring [195th] Meeting of the Electrochemical Society."--Preface

Includes bibliographic references and indexes

• NII書誌ID(NCID): BA43707528
• ISBN:
  • 1566772249
• LCCN: 99062162
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, New Jersey
• 分類:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Mathematical models Congresses
  • LCSH : Crystals -- Defects -- Mathematical models Congresses
  • LCSH : Ion implantation -- Mathematical models Congresses
• 親書誌ID:
  • BA01323290