Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.
著者
書誌事項
Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.
(Materials Research Society symposium proceedings, v. 574)
Materials Research Society, 1999
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注記
Includes bibliographical references
内容説明・目次
内容説明
The exceptional properties of multicomponent oxides, combined with the inability of simpler materials to meet the increasing demands of the electronics industry, have motivated tremendous interest and activity in utilizing multicomponent oxides for electronic applications. For these applications, it is often desirable to integrate complex oxides in thin-film form with other materials. This book focuses on common materials issues involved in the processing and characterization of multicomponent oxides and how these issues relate to device applications. Papers range from theoretical explanations of the magnetic and electronic properties of transition metal oxides, to integration with silicon technology. Noteworthy is the progress being made in the deposition and characterization of these complex materials, as well as their applicability in ferroelectric memories, MOSFETs, optical devices, infrared imaging arrays, etc. Topics include: epitaxial multicomponent oxide film growth; properties, characterization and modeling; properties of multicomponent oxides; and multicomponent oxide devices.
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