Radio frequency power in plasmas : 13th Topical Conference : Annapolis, Maryland April 1999

Author(s)

• Berabei, Stefano
• Paoletti, Franco
• American Institute of Physics
• Topical Conference on Radio Frequency Power in Plasmas

Bibliographic Information

Radio frequency power in plasmas : 13th Topical Conference : Annapolis, Maryland April 1999

editors, Stefano Bernabei, Franco Paoletti

（AIP conference proceedings, no. 485）

American Institute of Physics, c1999

Note

DOE CONF-990411

Details

• NCID: BA43997177
• ISBN:
  • 1563968614
• LCCN: 99065468
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Melville, N.Y
• Pages/Volumes: xiii, 504 p.
• Size: 25 cm
• Classification:
  • DC21 : 530.44
• Subject Headings:
  • LCSH : Radio frequency
  • LCSH : Plasma (Ionized gases)
• Parent Bibliography ID:
  • BA00284604