Microelectromechanical systems (MEMS) 1997 : micromechanical systems, microscale energy transport : presented at the 1997 International Mechanical Engineering Congress and Exposition, November 16-21, 1997, Dallas, Texas
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書誌事項
Microelectromechanical systems (MEMS) 1997 : micromechanical systems, microscale energy transport : presented at the 1997 International Mechanical Engineering Congress and Exposition, November 16-21, 1997, Dallas, Texas
(DSC, vol. 62)(HTD, vol. 354)
American Society of Mechanical Engineers, c1997
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
The proceedings of the November 1997 symposium contain 38 papers on micromechanical systems and microscale energy transport. Part one covers devices and applications; fluidic systems; fabrication and actuators; and characterization and modeling. Part two covers laser absorption by metals and organic
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